Abstract
Silicon nitride (SiNx) films were deposited at low temperature (75 °C) using inductively coupled plasma chemical vapor deposition (ICP-CVD) system, which yields high-quality films with controllable low total stress and a hydrogen content less than 10 at.%. As an example for demonstrating SiNx material suitable for photonic applications in the visible to infrared wavelength range, optical transmission spectra of distributed Bragg reflectors (DBR) with 12-period SiNx/silicon dioxide (SiO2) multilayer films are studied. SiNx-based integrated photonic devices such as Archimedean spiral waveguides, microdisks, ring resonators, and photonic crystal nanocavities have also been demonstrated.
© 2015 Optical Society of America
PDF ArticleMore Like This
Joyce K. S. Poon, Wesley D. Sacher, Ying Huang, and Guo-Qiang Lo
Th3F.1 Optical Fiber Communication Conference (OFC) 2015
Ayesha Jayantha, Aurore Andrieux, Isabelle Gallet, Christophe Finot, and Kamal Hammani
ce_7_5 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023
Riazul Arefin, Sujit Ramachandra, Hyemin Jung, Syed M. N. Hasan, Weicheng You, Sarvagya Dwivedi, and Shamsul Arafin
JTh2B.19 CLEO: Applications and Technology (CLEO:A&T) 2020