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Fabrication of all shallowly etched silicon reflection-type arrayed-waveguide gratings with one stigmatic point

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Abstract

We design, fabricate and measure an all shallowly etched reflection-type silicon arrayed waveguide gratings(R-AWG) with one stigmatic point, which contributes to reducing the crosstalk of R-AWG.

© 2014 Optical Society of America

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