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Fabrication of a Miniature Fiber-optic EFPI Pressure Sensor

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Abstract

A miniature(Φ300μm) fiber optic EFPI pressure sensor using SU-8 photoresist is fabricated. Both pressure and temperature characteristics have been studied, and it shows a good linearity within 100~700Pa with a sensitivity of 0.765nm/kPa.

© 2013 Optical Society of America

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