Abstract
A miniature(Φ300μm) fiber optic EFPI pressure sensor using SU-8 photoresist is fabricated. Both pressure and temperature characteristics have been studied, and it shows a good linearity within 100~700Pa with a sensitivity of 0.765nm/kPa.
© 2013 Optical Society of America
PDF ArticleMore Like This
Ding Ding, Na Chen, Qiang Guo, Zhenyi Chen, Shupeng Liu, Fufei Pang, and Tingyun Wang
83112I Asia Communications and Photonics Conference and Exhibition (ACP) 2011
Sven Poeggel, Daniele Tosi, Gabriel Leen, and Elfed Lewis
87970B European Conference on Biomedical Optics (ECBO) 2013
S. Poeggel, D. Tosi, G. Leen, and E. Lewis
CH_3_5 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2013