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Highly-sensitive optical waveguide sensor based on SiON using two cascaded-microring resonators

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Abstract

A waveguide sensor using two cascaded micro-ring resonators based on silicon oxynitride (SiON) waveguide was investigated. The refractive index change of 2.9×10-7 can be measured through intensity interrogation with a low-cost broadband light source.

© 2012 Optical Society of America

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