Abstract
A novel structure of Micro-Optic-Electro-Mechanical-System (MOEMS) gyroscope was designed. Optical waveguide diffractive component, electro-optical modulator and Surface Acoustic Wave (SAW) sensor etc. were integrated on a XY LiNbO3 substrate. The obtained sensitivity was 12 uVdeg-1s-1 in the angular rate range of 0–400deg/s.
© 2010 Optical Society of America
PDF ArticleMore Like This
Y. V. Flores, M. Haertelt, S. Hugger, L. Butschek, C. Schilling, A. Merten, M. Schwarzenberg, A. Dreyhaupt, J. Grahmann, M. Rattunde, and R. Ostendorf
cb_7_5 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2019
U. RUST and E. STRAKE
ME4 Integrated Photonics Research (IPR) 1992
V. Hinkov, U. Nolte, and W. Sohler
TuAA4 Integrated and Guided Wave Optics (IGWO) 1989