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MOEMS Gyroscope based on acoustooptic mode coupling

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Abstract

A novel structure of Micro-Optic-Electro-Mechanical-System (MOEMS) gyroscope was designed. Optical waveguide diffractive component, electro-optical modulator and Surface Acoustic Wave (SAW) sensor etc. were integrated on a XY LiNbO3 substrate. The obtained sensitivity was 12 uVdeg-1s-1 in the angular rate range of 0–400deg/s.

© 2010 Optical Society of America

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