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Photoluminescence with Ultra-wide Spectrum from Radiative Defects in Si-rich SiNx

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Abstract

The photoluminescence from the radiative recombination defects in Si-rich SiNx with various Si concentrations was investigated. Due to the Si and N dangling bonds, ultra-wide spectra with full width at half maximum of ~250nm were achieved in visible region.

© 2009 OSA, IEEE Photonics Society, SPIE, COS, CIC

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